https://ogma.newcastle.edu.au/vital/access/ /manager/Index en-au 5 On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:30435 Wed 11 Apr 2018 16:36:28 AEST ]]> Frequency modulation technique for MEMS resistive sensing https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:20437 Sat 24 Mar 2018 08:03:22 AEDT ]]>